JPS6365217U - - Google Patents
Info
- Publication number
- JPS6365217U JPS6365217U JP15970186U JP15970186U JPS6365217U JP S6365217 U JPS6365217 U JP S6365217U JP 15970186 U JP15970186 U JP 15970186U JP 15970186 U JP15970186 U JP 15970186U JP S6365217 U JPS6365217 U JP S6365217U
- Authority
- JP
- Japan
- Prior art keywords
- line
- gas
- raw material
- supply
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15970186U JPS6365217U (en]) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15970186U JPS6365217U (en]) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365217U true JPS6365217U (en]) | 1988-04-30 |
Family
ID=31084377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15970186U Pending JPS6365217U (en]) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365217U (en]) |
-
1986
- 1986-10-17 JP JP15970186U patent/JPS6365217U/ja active Pending